脉冲激光制备ZnO薄膜的结构和光学特性The Structural and Optical Properties of ZnO Thin Films Prepared by Using Pulsed Laser Deposition
魏显起,周邦安,满宝元
摘要(Abstract)：
通过脉冲激光沉积方法在1.3 Pa氧氛围,石英衬底上制备了ZnO薄膜.用X射线衍射(XRD)谱,原子力显微镜(AFM),光致发光谱(PL)表征了薄膜的结构和光学特性.XRD谱显示在生长温度500℃时获得了六方结构的单晶薄膜;AFM显示出随着温度的提升,晶粒提升,而表面粗糙度变小;PL谱显示出强烈的紫外发射和蓝光发射.随着温度的提升,薄膜的结构和光学特性得到显著提高.
关键词(KeyWords)： PLD;ZnO薄膜;晶体结构;表面形貌;光学特性
基金项目(Foundation): 国家自然科学基金资助项目(10474059,90301002&90201025);; 山东省自然科学基金资助项目(Y2003A01)
作者(Author): 魏显起,周邦安,满宝元
DOI: 10.16393/j.cnki.37-1436/z.2006.05.014
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