臧永丽,刘景伦

• 1:山东理工大学理学院
• 2:菏泽学院物理与电子工程系

摘要(Abstract)：

利用直流磁控溅射法,在玻璃衬底上制备掺锰氧化锌(Zn O∶Mn)透明导电薄膜.研究了溅射功率对薄膜结构、力学性能和光电性能的影响.功率对薄膜应力影响不是很大,且应力均为负值,表现为压应力.溅射功率通过改变晶粒尺寸和结晶程度而影响薄膜的导电性能:当溅射功率为135 W时,薄膜的电阻率具有最小值为1.10×10-2Ω·cm.实验表明,功率是影响Zn O∶Mn薄膜性能的一个重要参量.

关键词(KeyWords)： ZnO∶Mn薄膜;透明导电薄膜;磁控溅射;溅射功率

Abstract:

Keywords:

基金项目(Foundation):

作者(Author): 臧永丽,刘景伦

DOI: 10.16393/j.cnki.37-1436/z.2015.02.009

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